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diff --git a/inf/rn/dok/lyx/thesisExample.bib b/inf/rn/dok/lyx/thesisExample.bib new file mode 100644 index 0000000..250e6aa --- /dev/null +++ b/inf/rn/dok/lyx/thesisExample.bib @@ -0,0 +1,2126 @@ +% This file was created with JabRef 2.5. +% Encoding: Cp1252 + +@ARTICLE{Abgr07, + author = {P. Abgrall and A.-M. Gué}, + title = {Lab-on-chip technologies: making a microfluidic network and coupling + it into a complete microsystem---a review}, + journal = {J. Micromech. Microeng.}, + year = {2007}, + volume = {17}, + pages = {R15\,-\,R49}, + doi = {10.1088/0960-1317/17/5/R01}, + file = {Abgrall07-Review.pdf:Photolacke\\Abgrall07-Review.pdf:PDF}, + url = {http://dx.doi.org/10.1088/0960-1317/17/5/R01} +} + +@ARTICLE{Abgr06, + author = {P. Abgrall and others}, + title = {A novel fabrication method of flexible and monolithic {3D microfluidic + structures using lamination of SU-8} films}, + journal = {J. Micromech. Microeng.}, + year = {2006}, + volume = {16}, + pages = {113\,-\,121}, + doi = {10.1088/0960-1317/16/1/016}, + file = {SU-8-selbst-hergestellt.pdf:Photolacke\\SU-8-selbst-hergestellt.pdf:PDF}, + url = {http://dx.doi.org/10.1088/0960-1317/16/1/016} +} + +@ARTICLE{Abol05, + author = {S.N. Abolmasov and T. Shirafuji and K. Tachibana}, + title = {Submillimeter Dielectric Barrier Discharges at Atmospheric Pressure: + Edge Effect}, + journal = {IEEE Trans. Plasma Sci.}, + year = {2005}, + volume = {33}, + pages = {941\,-\,948}, + doi = {10.1109/TPS.2005.845093}, + file = {Abolmasov-submillimeter-discharge-2005.pdf:DBD\\Abolmasov-submillimeter-discharge-2005.pdf:PDF}, + review = {Priorität 1 + + Gute Berechnungsgrundlage, noch zwei Bücher der Literaturliste besorgen.}, + url = {http://dx.doi.org/10.1109/TPS.2005.845093} +} + +@ARTICLE{Akis03, + author = {Yu.S. Akishev and A.V. Dem\textrm{'}yanov and V.B. Karal\textrm{'}nik + and A.E. Monich and N.I. Trushkin}, + title = {Comparison of the AC Barrier Corona with DC Positive and Negative + Coronas and Barrier Discharge}, + journal = {Plasma Physics Reports}, + year = {2003}, + volume = {29}, + pages = {90\,-\,100}, + doi = {10.1134/1.1538505}, + file = {Akishev-Comparison-BC-dischages-2003.pdf:DBD\\Akishev-Comparison-BC-dischages-2003.pdf:PDF}, + url = {http://www.triniti.ru/CTF\&VM/Articles/Demyanov3.pdf} +} + +@ARTICLE{Baba01, + author = {S.E. Babayan and others}, + title = {Deposition of silicon dioxide films with a non-equilibrium atmospheric-pressure + plasma jet}, + journal = {Plasma Sources Sci. Technol.}, + year = {2001}, + volume = {10}, + pages = {573\,-\,578}, + number = {4}, + doi = {10.1088/0963-0252/10/4/305}, + file = {:DBD\\Babayan-SiOx-2001.pdf:PDF}, + publisher = {Bristol, UK: IOP Pub.; Woodbury, NY: American Institute of Physics, + c1991-}, + url = {http://dx.doi.org/10.1088/0963-0252/10/4/305} +} + +@ARTICLE{Beck06, + author = {K.H. Becker and K.H. Schoenbach and J.G. Eden}, + title = {Microplasmas and applications}, + journal = {J. Phys. D: Appl. Phys.}, + year = {2006}, + volume = {39}, + pages = {R55\,-\,R70}, + doi = {10.1088/0022-3727/39/3/R01}, + file = {:DBD\\Becker_Overview microplasmas-2006.pdf:PDF}, + url = {http://dx.doi.org/10.1088/0022-3727/39/3/R01} +} + +@ARTICLE{Bile04, + author = {B. Bilenberg and T. Nielsen and B. Clausen and A. Kristensen}, + title = {PMMA to SU-8 bonding for polymer based lab-on-a-chip systems with + integrated optics}, + journal = {J. Micromech. Microeng.}, + year = {2004}, + volume = {14}, + pages = {814\,-\,818}, + doi = {10.1088/0960-1317/14/6/008}, + file = {Bile04.pdf:Photolacke\\Bile04.pdf:PDF}, + url = {http://dx.doi.org/10.1088/0960-1317/14/6/008} +} + +@ARTICLE{Blan04, + author = {F. J. Blanco and others}, + title = {Novel three-dimensional embedded {SU-8} microchannels fabricated + using a low temperature full wafer adhesive bonding}, + journal = {J. Micromech. Microeng.}, + year = {2004}, + volume = {14}, + pages = {1047\,-\,1056}, + doi = {10.1088/0960-1317/14/7/027}, + file = {Blan04.pdf:Photolacke\\Blan04.pdf:PDF}, + url = {http://dx.doi.org/10.1088/0960-1317/14/7/027} +} + +@ARTICLE{Boga02, + author = {A. Bogaerts and E. Neyts and R. Gijbels and J. van der Mullen}, + title = {Gas discharge plasmas and their applications}, + journal = {Spectrochim. Acta. B Atom. Spectros.}, + year = {2002}, + volume = {57}, + pages = {609--658}, + number = {4}, + doi = {10.1016/S0584-8547(01)00406-2}, + file = {:Allgemein\\2002_gas discharge plasmas and their applications.pdf:PDF}, + publisher = {Elsevier}, + url = {\href{http://dx.doi.org/10.1016/S0584-8547(01)00406-2}{http://dx.doi.org/10.1016/S0584-8547(01)00406-2}} +} + +@BOOK{Bohl1989, + title = {Technische Strömungslehre}, + publisher = {Vogel-Verlag, Würzburg}, + year = {1989}, + author = {Willi Bohl}, + edition = {8th}, + url = {http://www.worldcat.org/oclc/315749265} +} + +@ARTICLE{Bran07, + author = {R. Brandenburg and others}, + title = {Antimicrobial Treatment of Heat Sensitive Materials by Means of Atmospheric + Pressure {Rf}-Driven Plasma Jet}, + journal = {Contrib. Plasma Phys.}, + year = {2007}, + volume = {47}, + pages = {72\,-\,79}, + doi = {10.1002/ctpp.200710011}, + file = {:DBD\\Brandenburg07-PlasmaJet-microbial.pdf:PDF}, + url = {http://dx.doi.org/10.1002/ctpp.200710011} +} + +@ARTICLE{Bran05, + author = {R. Brandenburg and H.-E. Wagner and A.M. Morozov and K.V. Kozlov}, + title = {Axial and radial development of microdischarges of barrier discharges + in {N2/O2} mixtures at atmospheric pressure}, + journal = {J. Phys. D: Appl. Phys.}, + year = {2005}, + volume = {38}, + pages = {1649\,-\,1657}, + number = {11}, + doi = {10.1088/0022-3727/38/11/003}, + file = {:DBD\\Brandenburg-DBD-characteristics-05.pdf:PDF}, + publisher = {London: The Institute of Physics and The Physical Society.}, + url = {http://dx.doi.org/10.1088/0022-3727/38/11/003} +} + +@CONFERENCE{Brea09, + author = {M.C. Breadmore and E. Candish and R.M. Guijt}, + title = {Dry film photoresist, saving time and money without compromising + on performance}, + booktitle = {\textmu TAS 2009}, + year = {2009} +} + +@BOOK{Bruu08, + title = {Theoretical Microfluidics}, + publisher = {Oxford University Press}, + year = {2008}, + author = {Henrik Bruus}, + url = {http://www.worldcat.org/oclc/176807166} +} + +@ARTICLE{Bull01, + author = {N.A. Bullett and others}, + title = {Direct imaging of plasma-polymerized chemical micropatterns}, + journal = {Surf. Interface Anal.}, + year = {2001}, + volume = {31}, + pages = {1074\,-\,1076}, + number = {11}, + doi = {10.1002/sia.1146}, + file = {:DBD\\Bullett-SEM mask pattern-2001.pdf:PDF}, + url = {http://dx.doi.org/10.1002/sia.1146} +} + +@ARTICLE{Carl04, + author = {J. Carlier and others}, + title = {Integrated microfluidics based on multi-layered SU-8 for mass spectrometry + analysis}, + journal = {J. Micromech. Microeng.}, + year = {2004}, + volume = {14}, + pages = {619\,-\,624}, + doi = {10.1088/0960-1317/14/4/024}, + file = {Carlier04.pdf:Photolacke\\Carlier04.pdf:PDF}, + url = {http://dx.doi.org/10.1088/0960-1317/14/4/024} +} + +@ARTICLE{Carl1977, + author = {Carlsson, DJ and Garton, A. and Wiles, DM}, + title = {The weatherability of polypropylene monofilaments. Effects of fiber + production conditions}, + journal = {Journal of Applied Polymer Science}, + year = {1977}, + volume = {21}, + pages = {2963\,-\,2978}, + number = {11}, + doi = {10.1002/app.1977.070211112}, + file = {:DBD\\Carlsson-PP-oxidation-1977.pdf:PDF}, + publisher = {Wiley Subscription Services, Inc., A Wiley Company New York}, + url = {http://dx.doi.org/10.1002/app.1977.070211112} +} + +@ARTICLE{Carr1903, + author = {W.R. Carr}, + title = {On the Laws Governing Electric Discharges in Gases at Low Pressures}, + journal = {Phil. Trans. Roy. Soc. Lond. Math. Phys. Sci.}, + year = {1903}, + volume = {201}, + pages = {403-433}, + doi = {10.1098/rsta.1903.0020}, + file = {:DBD\\Carr-Electric dischare at low pressure-1903.pdf:PDF}, + url = {http://dx.doi.org/10.1098/rsta.1903.0020} +} + +@ARTICLE{Chang00, + author = {H.-K. Chang and Y.-K. Kim}, + title = {{UV-LIGA process for high aspect ratio structure using stress barrier + and C-shaped etch hole}}, + journal = {Sensors and Actuators A}, + year = {2000}, + volume = {84}, + pages = {342\,-\,350}, + doi = {10.1016/S0924-4247(00)00408-8}, + file = {SU-8-Aspektverhaeltnis-Springer.pdf:Photolacke\\SU-8-Aspektverhaeltnis-Springer.pdf:PDF}, + url = {\href{http://dx.doi.org/10.1016/S0924-4247(00)00408-8}{http://dx.doi.org/10.1016/S0924-4247(00)00408-8}} +} + +@ARTICLE{Char1967, + author = {F.M. Charbonnier and C.J. Bennette and L.W.~Swanson}, + title = {Electrical Breakdown between Metal Electrodes in High Vacuum. I. + Theory}, + journal = {J. Appl. Phys.}, + year = {1967}, + volume = {38}, + pages = {627\,-\,633}, + doi = {10.1063/1.1709385}, + file = {:DBD\\Charbonnier-Breakdown-1967.pdf:PDF}, + publisher = {AIP}, + url = {http://dx.doi.org/10.1063/1.1709385} +} + +@ARTICLE{Char1967-2, + author = {F.M. Charbonnier and C.J. Bennette and L.W. Swanson}, + title = {Electrical Breakdown between Metal Electrodes in High Vacuum. II. + Experimental}, + journal = {J. Appl. Phys.}, + year = {1967}, + volume = {38}, + pages = {634\,-\,640}, + doi = {10.1063/1.1709386}, + file = {:DBD\\Charbonnier-Breakdown-1967-2.pdf:PDF}, + publisher = {AIP}, + url = {http://dx.doi.org/10.1063/1.1709386} +} + +@ARTICLE{Coog1996, + author = {J.J. Coogan and A.D. Sappey}, + title = {Distribution of {OH} within silent discharge plasma reactors}, + journal = {IEEE Trans. Plasma Sci.}, + year = {1996}, + volume = {24}, + pages = {91\,-\,92}, + number = {1}, + doi = {10.1109/27.491706}, + file = {:DBD\\Coogan-FilamentDiameter-1996.pdf:PDF}, + url = {http://dx.doi.org/10.1109/27.491706} +} + +@ARTICLE{Cutl1993, + author = {P. Cutler}, + title = {Theory of electron emission in high fields from atomically sharp + emitters: Validity of the Fowler-Nordheim equation}, + journal = {Progress in Surface Science}, + year = {1993}, + volume = {42}, + pages = {169\,-\,185}, + number = {1-4}, + doi = {10.1016/0079-6816(93)90068-7}, + file = {:DBD\\Cutler-Emission in high fields-1993.pdf:PDF}, + url = {\href{http://dx.doi.org/10.1016/0079-6816(93)90068-7}{http://dx.doi.org/10.1016/0079-6816(93)90068-7}} +} + +@BOOK{Davi1998, + title = {Metals handbook: desk edition}, + publisher = {ASM International}, + year = {1998}, + author = {J.R. Davis}, + pages = {1128}, + edition = {2nd} +} + +@ARTICLE{Dikm04, + author = {A.J. Dikmans and others}, + title = {A new compact disc format of high density array synthesis applied + to peptide nucleic acids and in situ {MALDI} analysis}, + journal = {Molecular diversity}, + year = {2004}, + volume = {8}, + pages = {197\,-\,207}, + number = {3}, + doi = {10.1023/B:MODI.0000036234.66238.4e}, + file = {:Allgemein\\Dikmans-Amino-array-2004.pdf:PDF}, + url = {http://dx.doi.org/10.1023/B:MODI.0000036234.66238.4e} +} + +@PHDTHESIS{Dora02, + author = {Rajesh Dorai}, + title = {Modeling of Atmospheric Pressure Plasma Processing of Gases and Surfaces}, + school = {University of Illinois at Urbana-Champaign}, + year = {2002}, + file = {:DBD\\Dorai-plasma-reactions-2002.pdf:PDF}, + url = {http://uigelz.eecs.umich.edu/pub/theses/rajesh_phd_thesis.pdf} +} + +@ARTICLE{Dora03, + author = {R. Dorai and M.J. Kushner}, + title = {A model for plasma modification of polypropylene using atmospheric + pressure discharges}, + journal = {J. Phys. D: Appl. Phys}, + year = {2003}, + volume = {36}, + pages = {666\,-\,685}, + number = {6}, + doi = {10.1088/0022-3727/36/6/309}, + file = {:DBD\\Dorai-PP-Surface-chemistry-2003.pdf:PDF}, + publisher = {IOP PUBLISHING LTD}, + url = {http://dx.doi.org/10.1088/0022-3727/36/6/309} +} + +@ARTICLE{Dush1923, + author = {S. Dushman}, + title = {Electron Emission from Metals as a Function of Temperature}, + journal = {Physical Review}, + year = {1923}, + volume = {21}, + pages = {623\,-\,636}, + doi = {10.1103/PhysRev.21.623}, + file = {:DBD\\Dushman-Thermionic-Emission-1923.pdf:PDF}, + publisher = {APS}, + url = {http://dx.doi.org/10.1103/PhysRev.21.623} +} + +@ARTICLE{Eden03, + author = {J.G. Eden and others}, + title = {Microplasma devices fabricated in silicon, ceramic, and metal/polymer + structures: arrays, emitters and photodetectors}, + journal = {J. Phys. D: Appl. Phys.}, + year = {2003}, + volume = {36}, + pages = {2869\,-\,2877}, + doi = {10.1088/0022-3727/36/23/001}, + file = {:DBD\\Eden-Cavity Silicon-2003.pdf:PDF}, + url = {http://dx.doi.org/10.1088/0022-3727/36/23/001} +} + +@CONFERENCE{Eich05, + author = {M. Eichler and M. Thomas and H. Mewes and C.-P. Klages}, + title = {{Ortsselektive Atmosphärendruck-Plasmavorbehandlung für das Direkt-Wafer-Bonden + bei niedrigen Temperaturen}}, + booktitle = {Mikrosystemtechnik Kongress 2005 : 10. bis 12. Oktober 2005 in Freiburg. + Berlin: VDE-Verlag, 2005, pp. 115-118}, + year = {2005}, + file = {Waferbonden_Eichler.pdf:DBD\\Waferbonden_Eichler.pdf:PDF}, + url = {http://www.vde-verlag.de/data/buecher.php?action=bookdetail\&vertriebsnr=562926} +} + +@ARTICLE{Elia1991, + author = {B. Eliasson and U. Kogelschatz}, + title = {Modeling and applications of silent discharge plasmas}, + journal = {IEEE Trans. Plasma Sci.}, + year = {1991}, + volume = {19}, + pages = {309\,-\,323}, + number = {2}, + doi = {10.1109/27.106829}, + file = {:DBD\\Eliasson-Modelling-1991.pdf:PDF}, + url = {http://dx.doi.org/10.1109/27.106829} +} + +@ARTICLE{Klei03, + author = {F.Kleinschmidt, U.Stöhr, K.Saalwächter and others}, + title = {NMR Spectroscopy Characterization and Self-Diffusion Study of Partially + Swollen Polymer Networks.}, + journal = {Macromol. Chem. Phys.}, + year = {2003}, + volume = {204}, + pages = {F24\,-\,F25} +} + +@INPROCEEDINGS{Fahl01, + author = {M. Fahland and C. Charton and V. Kirchhoff and U. Stöhr}, + title = {Deposition of multilayer optical coatings onto plastic webs by pulse + magnetron sputtering; challenges and opportunities}, + booktitle = {Proceedings 6th. International Symposium on Sputtering and Plasma + Processes (ISSP), p. 189, Kanazawa, Japan}, + year = {2001}, + file = {:Allgemein\\Fahrland-Sputtering-2001.pdf:PDF} +} + +@CONFERENCE{Flac02, + author = {W.W. Flack and H.A. Nguyen and E. Capsuto}, + title = {Characterization of a novel photoresist redistribution material for + advanced packaging applications}, + booktitle = {Society of Photo-Optical Instrumentation Engineers (SPIE) Conference + Series}, + year = {2002}, + volume = {4690}, + pages = {1203\,-\,1216}, + doi = {10.1117/12.474198}, + file = {:Photolacke\\SINR-resist-2002.pdf:PDF}, + url = {http://dx.doi.org/10.1117/12.474198} +} + +@ARTICLE{Forb1999, + author = {R.G. Forbes}, + title = {Refining the application of Fowler-Nordheim theory}, + journal = {Ultramicroscopy}, + year = {1999}, + volume = {79}, + pages = {11\,-\,23}, + doi = {10.1016/S0304-3991(99)00097-2}, + file = {:DBD\\Forbes - Refining the application of Fowler-Nordheim theory.pdf:PDF}, + url = {http://dx.doi.org/10.1016/S0304-3991(99)00097-2} +} + +@ARTICLE{Fowl1928, + author = {R.H. Fowler and L. Nordheim}, + title = {Electron Emission in Intense Electric Fields}, + journal = {Proceedings of the Royal Society of London. Series A, Containing + Papers of a Mathematical and Physical Character}, + year = {1928}, + volume = {119}, + pages = {173\,-\,181}, + number = {781}, + month = {May}, + file = {:DBD\\Fowler-Nordheim-1928.pdf:PDF}, + url = {http://www.jstor.org/pss/95023} +} + +@ARTICLE{Gabo1993, + author = {S.R. Gaboury and M.W. Urban}, + title = {Microwave plasma reactions of solid monomers with silicone elastomer + surfaces: a spectroscopic study}, + journal = {Langmuir}, + year = {1993}, + volume = {9}, + pages = {3225\,-\,3233}, + number = {11}, + doi = {10.1021/la00035a076}, + file = {:DBD\\Gaboury-Epoxy-on-PDMS-1993.pdf:PDF}, + publisher = {American Chemical Society}, + url = {http://dx.doi.org/10.1021/la00035a076} +} + +@MISC{GEKA, + author = {{GEKA~mbH}}, + title = {Destroying chemical warfare agents and contaminated military waste}, + howpublished = {Internet: http://www.geka-munster.de/Seiten-engl/vernichtung/plasma-index.html + (accessed 06-09-2009)}, + owner = {usti}, + url = {http://www.geka-munster.de/Seiten-engl/vernichtung/plasma-index.html} +} + +@MASTERSTHESIS{Gerb03, + author = {M. Gerbracht}, + title = {{Trocknung dicker Photoresistschichten mittels unterschiedlicher + Trocknungsverfahren}}, + school = {Fachhochschule Düsseldorf}, + year = {2003}, + type = {Diplomarbeit}, + file = {:Photolacke\\Resiste_Diplomarbeit_Gerbracht.pdf:PDF} +} + +@INPROCEEDINGS{Golub02-2, + author = {Yu.B. Golubovskii and V.A. Maiorov v J. Behnke and J.F. Behnke}, + title = {Stability of the barrier discharge relative to the filamentation}, + booktitle = {Proc. of 16th ESCAMPIG/5th ICRP (Grenoble, France, 14-18 July 2002), + Vol. 1, p. 235-236}, + year = {2002}, + file = {Golubovskii02-Filament-stability.pdf:DBD\\Golubovskii02-Filament-stability.pdf:PDF}, + url = {http://optics.phys.spbu.ru/~golub/articles/barrier2d\_16ESCAMPIG.pdf} +} + +@ARTICLE{Golub03, + author = {Yu.B. Golubovskii and V.A. Maiorov and J. Behnke and J.F. Behnke}, + title = {Modelling of the homogeneous barrier discharge in helium at atmospheric + pressure}, + journal = {J. Phys. D: Appl. Phys.}, + year = {2003}, + volume = {36}, + pages = {39\,-\,49}, + doi = {10.1088/0022-3727/36/1/306}, + file = {DBD_Heliumatmosphäre_Golubovskii03.pdf:DBD_Heliumatmosphäre_Golubovskii03.pdf:PDF}, + url = {http://dx.doi.org/10.1088/0022-3727/36/1/306} +} + +@INPROCEEDINGS{Golub01, + author = {Yu.B. Golubovskii and V.A. Maiorov and J. Behnke and J.F. Behnke}, + title = {The role of emission from the dielectric surface in a homogeneous + barrier discharge in nitrogen}, + booktitle = {Proc. of 15th Int. Symp. on Plasma Chemistry (Orléans, France, 10-13 + July 2001) vol VIII p 3239-3244}, + year = {2001}, + file = {DBD_EmissionenausDielektrikum_Golubovskii01.pdf:DBD\\DBD_EmissionenausDielektrikum_Golubovskii01.pdf:PDF}, + url = {http://optics.phys.spbu.ru/~golub/articles/DBD\_ISPC15.pdf} +} + +@MISC{Filament, + author = {Yu. B. Golubovskii}, + howpublished = {Internet:\newline http://optics.phys.spbu.ru/\textasciitilde{}golub/images/filament.jpg + (accessed 07-09-2009)}, + owner = {usti}, + url = {http://optics.phys.spbu.ru/~golub/images/filament.jpg} +} + +@INPROCEEDINGS{Golub02, + author = {Yu. B. Golubovskii and V. A. Maiorov and J. Behnke and J. F. Behnke}, + title = {Some Aspects of the Modeling of an Uniform Barrier Discharge in Nitrogen}, + booktitle = {Proc. of 16th ESCAMPIG/5th ICRP (Grenoble, France, 14-18 July 2002), + Vol. 1, p. 233-234}, + year = {2002}, + file = {DBD_N2Atmosphäre_Golubovskii02.pdf:DBD\\DBD_N2Atmosphäre_Golubovskii02.pdf:PDF}, + url = {http://optics.phys.spbu.ru/~golub/articles/DBD\_N2\_16ESCAMPIG.pdf} +} + +@MISC{GolubWeb, + author = {Yu. B. Golubovskii and others}, + title = {Homogeneous barrier discharge}, + howpublished = {Internet: http://optics.phys.spbu.ru/\textasciitilde{}golub/english/barrier.html}, + url = {http://optics.phys.spbu.ru/~golub/english/barrier.html} +} + +@ARTICLE{Goos1998, + author = {A. Goossens and E.L. Maloney and J Schoonman}, + title = {Gas-Phase Synthesis of Nanostructured Anatase $\mathrm{TiO_2}$}, + journal = {Chemical Vapor Deposition}, + year = {1998}, + volume = {4}, + pages = {109\,-\,114}, + number = {3}, + doi = {10.1002/(SICI)1521-3862(199805)04:03<109::AID-CVDE109>3.0.CO;2-U}, + file = {:DBD\\Goossens-TiCl4-1998.pdf:PDF}, + publisher = {WILEY-VCH Verlag GmbH Weinheim}, + url = {\href{http://dx.doi.org/10.1002/(SICI)1521-3862(199805)04:03<109::AID-CVDE109>3.0.CO;2-U}{http://dx.doi.org/10.1002/(SICI)1521-3862(199805)04:03<109::AID-CVDE109>3.0.CO;2-U}} +} + +@ARTICLE{Graz08, + author = {I. Graz and A. Ebner and S. Bauer and C. Romanin and H. Gruber}, + title = {Micropatterned atmospheric pressure discharge surface modification + of fluorinated polymer films for mammalian cell adhesion and protein + binding}, + journal = {Appl. Phys. A}, + year = {2008}, + volume = {92}, + pages = {547\,-\,555}, + doi = {10.1007/s00339-008-4614-z}, + file = {:DBD\\Graz-Patterned surface treatment-2008.pdf:PDF}, + url = {http://dx.doi.org/10.1007/s00339-008-4614-z} +} + +@ARTICLE{Han04, + author = {M. Han and W. Lee and S.-K. Lee and S.S. Lee}, + title = {{3D microfabrication with inclined/rotated UV lithography}}, + journal = {Sensors and Actuators A}, + year = {2003}, + volume = {111}, + pages = {14\,-\,20}, + doi = {10.1016/j.sna.2003.10.006}, + file = {Rotated UV.pdf:Photolacke\\Rotated UV.pdf:PDF}, + url = {http://dx.doi.org/10.1016/j.sna.2003.10.006} +} + +@ARTICLE{Hand00, + author = {K. Handique and D.T. Burke and C.H. Mastrangelo and M.A. Burns}, + title = {{Nanoliter liquid metering in microchannels using hydrophobic patterns}}, + journal = {Anal. Chem.}, + year = {2000}, + volume = {72}, + pages = {4100\,-\,4109}, + number = {17}, + doi = {10.1021/ac000064s}, + file = {:Allgemein\\Handique-hydrophobic-channels-2000.pdf:PDF}, + url = {http://dx.doi.org/10.1021/ac000064s} +} + +@ARTICLE{Hei04, + author = {M. Heise and W. Neff and O. Franken and P. Muranyi and J. Wunderlich}, + title = {Sterilization of Polymer Foils with Dielectric Barrier Discharges + at Atmospheric Pressure}, + journal = {Plasmas polym.}, + year = {2004}, + volume = {9}, + pages = {23\,-\,33}, + doi = {10.1023/B:PAPO.0000039814.70172.c0}, + file = {DBD_Sterilisation_Heise2004.pdf:DBD\\DBD_Sterilisation_Heise2004.pdf:PDF}, + url = {http://dx.doi.org/10.1023/B:PAPO.0000039814.70172.c0} +} + +@ARTICLE{Hens07, + author = {K. Hensel and others}, + title = {Electrical and Optical Properties of {AC} Microdischarges in Porous + Ceramics}, + journal = {Plasma Process. Polym.}, + year = {2007}, + volume = {4}, + pages = {682\,-\,693}, + doi = {10.1002/ppap.200700022}, + file = {:DBD\\Hensel-DBD-in-Ceramics-2007.pdf:PDF}, + publisher = {WILEY-VCH Verlag Weinheim}, + url = {http://dx.doi.org/10.1002/ppap.200700022} +} + +@ARTICLE{Heul04, + author = {M. Heule and U.P. Schönholzer and L.J. Gauckler}, + title = {Patterning colloidal suspensions by selective wetting of microcontact-printed + surfaces}, + journal = {J. Eur. Ceram. Soc.}, + year = {2003}, + volume = {24}, + pages = {2733\,-\,2739}, + doi = {10.1016/j.jeurceramsoc.2003.09.011}, + file = {:DBD\\Heule2004.pdf:PDF}, + url = {http://dx.doi.org/10.1016/j.jeurceramsoc.2003.09.011} +} + +@ARTICLE{Heusch1998, + author = {M.O. Heuschkel and L. Guérin and B. Buisson and D. Bertrand and P. + Renaud}, + title = {Buried microchannels in photopolymer for delivering of solutions + to neurons in a network}, + journal = {Sensors and Actuators B}, + year = {1998}, + volume = {48}, + pages = {356\,-\,361}, + doi = {10.1016/S0925-4005(98)00071-9}, + file = {buried microchannels in photopolymer.pdf:Photolacke\\buried microchannels in photopolymer.pdf:PDF}, + url = {\href{http://dx.doi.org/10.1016/S0925-4005(98)00071-9}{http://dx.doi.org/10.1016/S0925-4005(98)00071-9}} +} + +@ARTICLE{Ho04, + author = {K.H. Ho and S.T. Newman and S. Rahimifard and R.D. Allen}, + title = {State of the art in wire electrical discharge machining {(WEDM)}}, + journal = {Int. J. Mach. Tool. Manufact.}, + year = {2004}, + volume = {44}, + pages = {1247\,-\,1259}, + number = {12\,-\,13}, + doi = {10.1016/j.ijmachtools.2004.04.017}, + publisher = {Elsevier}, + url = {http://dx.doi.org/10.1016/j.ijmachtools.2004.04.017} +} + +@ARTICLE{Inag1998, + author = {N. Inagaki and S. Tasaka and M. Makino}, + title = {Plasma polymer deposition from mixture of tetramethoxysilane and + oxygen on {PET} films and their oxygen gas barrier properties}, + journal = {J. Appl. Polym. Sci.}, + year = {1998}, + volume = {64}, + pages = {1031\,-\,1039}, + number = {6}, + doi = {10.1002/%28SICI%291097-4628%2819970509%2964%3A6%3C1031%3A%3AAID-APP1%3E3.0.CO%3B2-M}, + file = {:DBD\\Inagaki-SiOx-oxygen-barrier-1996.pdf:PDF}, + url = {http://dx.doi.org/10.1002/\%28SICI\%291097-4628\%2819970509\%2964\%3A6\%3C1031\%3A\%3AAID-APP1\%3E3.0.CO\%3B2-M} +} + +@ARTICLE{Ito07, + author = {T. Ito and others}, + title = {Characterization of a microfluidic device fabricated using a photosensitive + sheet}, + journal = {J. Micromech. Microeng.}, + year = {2007}, + volume = {17}, + pages = {432\,-\,438}, + doi = {10.1088/0960-1317/17/3/003}, + file = {Ito07.pdf:Photolacke\\Ito07.pdf:PDF}, + url = {http://dx.doi.org/10.1088/0960-1317/17/3/003} +} + +@ARTICLE{Jack01, + author = {R.J. Jackman and T.M. Floyd and R. Ghodssi and M.A. Schmidt and K.F. + Jensen}, + title = {Microfluidic systems with on-line UV detection fabricated in photodefinable + epoxy}, + journal = {J. Micromech. Microeng.}, + year = {2001}, + volume = {11}, + pages = {1\,-\,8}, + doi = {10.1088/0960-1317/11/3/316}, + file = {Jack01.pdf:Photolacke\\Jack01.pdf:PDF}, + url = {http://dx.doi.org/10.1088/0960-1317/11/3/316} +} + +@ARTICLE{Jens03, + author = {K.L. Jensen}, + title = {Electron emission theory and its application: Fowler--Nordheim equation + and beyond}, + journal = {J. Vac. Sci. Technol. B}, + year = {2003}, + volume = {21(4)}, + pages = {1528\,-\,1544}, + doi = {10.1116/1.1573664}, + file = {:DBD\\2003_Electron emission theory and its application.pdf:PDF}, + url = {http://dx.doi.org/10.1116/1.1573664} +} + +@ARTICLE{Jens02, + author = {K.L. Jensen}, + title = {Theory of Field Emission}, + journal = {Vacuum Microelectronics}, + year = {2002}, + volume = {Chapter 3}, + pages = {33\,-\,104}, + doi = {10.1002/0471224332.ch3}, + url = {http://dx.doi.org/10.1002/0471224332.ch3} +} + +@ARTICLE{Jide06, + author = {N. Jidenko and M. Petit and J.P. Borra}, + title = {Electrical characterization of microdischarges produced by dielectric + barrier discharge in dry air at atmospheric pressure}, + journal = {J. Phys. D: Appl. Phys.}, + year = {2006}, + volume = {39}, + pages = {281\,-\,293}, + number = {2}, + doi = {10.1088/0022-3727/39/2/008}, + file = {:DBD\\Jidenko-Plasma-Control-2006.pdf:PDF}, + url = {http://dx.doi.org/10.1088/0022-3727/39/2/008} +} + +@ARTICLE{Jigu06, + author = {S. Jigueta and M. Judelewicza and S. Mischlerb and A. Bertchc and + P. Renaudc}, + title = {Effect of filler behavior on nanocomposite {SU8} photoresist for + moving micro-parts}, + journal = {Microelectron. Eng.}, + year = {2006}, + volume = {83}, + pages = {1273\,-\,1276}, + doi = {10.1016/j.mee.2006.01.068}, + file = {Jiguet_SU-8_filler.pdf:Photolacke\\Jiguet_SU-8_filler.pdf:PDF}, + url = {http://dx.doi.org/10.1016/j.mee.2006.01.068} +} + +@ARTICLE{Kang03, + author = {W.S. Kang and J.M. Park and Y. Kim and S.H. Hong}, + title = {Numerical study on influences of barrier arrangements on dielectric + barrier discharge characteristics}, + journal = {IEEE Trans. Plasma Sci.}, + year = {2003}, + volume = {31}, + pages = {504\,-\,510}, + number = {4}, + doi = {10.1109/TPS.2003.815469}, + file = {:DBD\\Kang-StreamerSimulations-2003.pdf:PDF}, + url = {http://dx.doi.org/10.1109/TPS.2003.815469} +} + +@ARTICLE{Kawa1969, + author = {H. Kawauchi and K. Tuzimura and H. Maeda and N. Ishida}, + title = {Reaction of fluorescein-isothiocyanate with proteins and amino acids: + {II.} Preparation of FIuorescein-Thiohydantoin Amino Acids and Their + Thin-layer Chromatography}, + journal = {Journal of Biochemistry}, + year = {1969}, + volume = {66}, + pages = {783\,-\,789}, + number = {6}, + file = {:Allgemein\\Kawauchi-FITC-reaction-1969.pdf:PDF}, + publisher = {Jpn Biochemical Soc}, + url = {http://jb.oxfordjournals.org/cgi/content/abstract/66/6/783} +} + +@INPROCEEDINGS{Kien04, + author = {J. Kieninger and G. Jobst and G. Igel and I. Moser and G. Urban}, + title = {{3D} Polymer Microstructures by Laminating {SU-8} Films}, + booktitle = {{Proceedings of \textmu TAS 2004}}, + year = {2004}, + volume = {2}, + pages = {363\,-\,365}, + file = {:Photolacke\\Kieninger-Manuscript_microTAS04_SU.-8pdf.pdf:PDF} +} + +@ARTICLE{Kim04, + author = {K. Kim and others}, + title = {{A tapered hollow metallic microneedle array using backside exposure + of SU-8}}, + journal = {J. Micromech. Microeng.}, + year = {2004}, + volume = {14}, + pages = {597\,-\,603}, + doi = {10.1088/0960-1317/14/4/021}, + file = {Hollow Needles.pdf:Photolacke\\Hollow Needles.pdf:PDF}, + url = {http://dx.doi.org/10.1088/0960-1317/14/4/021} +} + +@ARTICLE{Kim03, + author = {S.-O. Kim and J.G. Eden}, + title = {Arrays of Microplasma Devices Fabricated in Photodefinable Glass + and Excited {AC or DC} by Interdigitated Electrodes}, + journal = {IEEE Photonics Technology Letters}, + year = {2005}, + volume = {17}, + pages = {1543\,-\,1545}, + doi = {10.1109/LPT.2005.848260}, + file = {:DBD\\Kim-Cavity Array Foturan-2005.pdf:PDF}, + url = {http://dx.doi.org/10.1109/LPT.2005.848260} +} + +@INPROCEEDINGS{Kim08, + author = {Y.K. Kim and D. J. Kim}, + title = {Deposition of super hydrophobic {a-C:F} films by dielectric barrier + discharge at atmospheric pressure}, + booktitle = {Book of Abstract of 11th International Conference on Plasma Surface + Engineering PSE 2008}, + year = {2008}, + file = {:DBD\\Kim-CxFy-surface-DBD-2008.pdf:PDF}, + url = {http://www.pse2008.net/pdf\_edit/tmp/PO1063-PSE2008-2f1418.pdf} +} + +@ARTICLE{Klag07-2, + author = {C.P. Klages and C. Berger and M. Eichler and M. Thomas}, + title = {Microplasma-Based Treatment of Inner Surfaces in Microfluidic Devices}, + journal = {Contributions to Plasma Physics}, + year = {2007}, + volume = {47}, + pages = {49\,-\,56}, + doi = {10.1002/ctpp.200710008}, + file = {:DBD\\Klages-plasmaprinting-channels-2007.pdf:PDF}, + publisher = {WILEY-VCH Verlag Berlin}, + url = {http://dx.doi.org/10.1002/ctpp.200710008} +} + +@ARTICLE{Klag00, + author = {C.P. Klages and K. Höpfner and N. Kläke and R. Thyen}, + title = {Surface functionalization at atmospheric pressure by {DBD}-based + pulsed plasma polymerization}, + journal = {Plasmas and Polymers}, + year = {2000}, + volume = {5}, + pages = {79\,-\,89}, + number = {2}, + doi = {10.1023/A:1009583815474}, + file = {:DBD\\Klages-Epoxy-groups-2000.pdf:PDF}, + publisher = {Springer}, + url = {\newline http://dx.doi.org/10.1023/A:1009583815474} +} + +@ARTICLE{Klag07, + author = {C.P. Klages and others}, + title = {Surface Technology with Cold Microplasmas}, + journal = {Plasma Process. Polym.}, + year = {2007}, + volume = {4}, + pages = {208\,-\,218}, + number = {3}, + doi = {10.1002/ppap.200600116}, + file = {:DBD\\Klages-Overview-07.pdf:PDF}, + publisher = {John Wiley \& Sons, Ltd}, + url = {\newline http://dx.doi.org/10.1002/ppap.200600116} +} + +@ARTICLE{Kogel03, + author = {U. Kogelschatz}, + title = {Dielectric-barrier Discharges: Their History, Discharge Physics, + and Industrial Applications}, + journal = {Plasma Chem. Plasma Process.}, + year = {2003}, + volume = {23}, + pages = {1\,-\,46}, + doi = {10.1023/A:1022470901385}, + file = {kogelschatz.pdf:DBD\\kogelschatz.pdf:PDF}, + url = {http://dx.doi.org/10.1023/A:1022470901385} +} + +@ARTICLE{Kogel02, + author = {U. Kogelschatz}, + title = {Filamentary, Patterned, and Diffuse Barrier Discharges}, + journal = {IEEE Trans. Plasma Sci.}, + year = {2002}, + volume = {30}, + pages = {1400\,-\,1408}, + number = {4}, + doi = {10.1109/TPS.2002.804201}, + file = {:DBD\\Kogelschatz-Filaments-2002.pdf:PDF}, + url = {http://dx.doi.org/10.1109/TPS.2002.804201} +} + +@ARTICLE{Koid07, + author = {T. Koida and H. Fujiwara and M. Kondo}, + title = {Hydrogen-doped $\mathrm{In_{2}O_{3}}$ as High-mobility Transparent + Conductive Oxide}, + journal = {Jpn. J. Appl. Phys.}, + year = {2007}, + volume = {46}, + pages = {L685\,-\,L687}, + number = {28}, + doi = {10.1143/JJAP.46.L685}, + file = {:Allgemein\\Koida-ITO-2007.pdf:PDF}, + url = {http://dx.doi.org/10.1143/JJAP.46.L685} +} + +@ARTICLE{Kozl05, + author = {K.V. Kozlov and others}, + title = {Barrier discharges in {N2/O}2 mixtures}, + journal = {J. Phys. D: Appl. Phys.}, + year = {2005}, + volume = {38}, + pages = {518\,-\,529}, + doi = {10.1088/0022-3727/38/4/003}, + file = {:DBD\\Kozlov-oxygen-impurity-2005.pdf:PDF}, + url = {http://dx.doi.org/10.1088/0022-3727/38/4/003} +} + +@ARTICLE{Krei05, + author = {S. Kreitz and C. Penache and M. Thomas and C.-P. Klages}, + title = {Patterned {DBD} treatment for area-selective metallization of polymers-plasma + printing}, + journal = {Surf. Coat. Technol.}, + year = {2005}, + volume = {200}, + pages = {676\,-\,679}, + doi = {10.1016/j.surfcoat.2005.01.085}, + file = {:DBD\\Kreitz05-Patterned DBD treatment.pdf:PDF}, + url = {http://dx.doi.org/10.1016/j.surfcoat.2005.01.085} +} + +@ARTICLE{Kukh03, + author = {E. Kukharenka and M.M. Farooqui and L. Grigore and M. Kraft and N. + Hollinshead}, + title = {Electroplating moulds using dry film thick negative photoresist.}, + journal = {J. Micromech. Microeng.}, + year = {2003}, + volume = {13}, + pages = {S67\,-\,S74}, + doi = {10.1088/0960-1317/13/4/311}, + file = {Ordyl-1.pdf:Photolacke\\Ordyl-1.pdf:PDF}, + url = {http://dx.doi.org/10.1088/0960-1317/13/4/311} +} + +@ARTICLE{Kunh00, + author = {E.E. Kunhardt}, + title = {Generation of Large-Volume, Atmospheric-Pressure, Nonequilibrium + Plasmas}, + journal = {IEEE Trans. Plasma Sci.}, + year = {2000}, + volume = {28}, + pages = {189\,-\,200}, + doi = {10.1109/27.842901}, + file = {:DBD\\Kunhardt00-Frequency-Ignition.pdf:PDF}, + url = {http://dx.doi.org/10.1109/27.842901} +} + +@ARTICLE{Kwak03, + author = {M.G. Kwak and others}, + title = {Improvement of Luminance Efficiency in Xenon Dielectric Barrier Discharge + Flat Lamp}, + journal = {IEEE Trans. Plasma Sci.}, + year = {2003}, + volume = {31}, + pages = {176\,-\, 178}, + doi = {10.1109/TPS.2003.808867}, + file = {Kwak-Xenon-Lamp-2002.pdf:DBD\\Kwak-Xenon-Lamp-2002.pdf:PDF}, + url = {http://dx.doi.org/10.1109/TPS.2003.808867} +} + +@ARTICLE{Lang05, + author = {B.A. Langowski and K.E. Uhrich}, + title = {Microscale Plasma-Initiated Patterning (\textmu {PIP})}, + journal = {Langmuir}, + year = {2005}, + volume = {21}, + pages = {10509\,-\,10514}, + doi = {10.1021/la052222m}, + file = {:DBD\\Langowski-PDMS plasma patterning-2005.pdf:PDF}, + url = {\newline http://dx.doi.org/10.1021/la052222m} +} + +@UNPUBLISHED{Lede08, + author = {L. Ledernez and F. Olcaytug and G. Urban and H. Yasuda}, + title = {Influence of the Electrode Material on the Electrical Breakdown of + Argon}, + note = {accepted for Plasma Sources Science and Technology} +} + +@ARTICLE{Leve1944, + author = {K. Levenberg}, + title = {A method for the solution of certain non-linear problems in least + squares}, + journal = {Q. Appl. Math}, + year = {1944}, + volume = {2}, + pages = {164\,-\,168}, + number = {2} +} + +@ARTICLE{Lu08, + author = {M. Lu and S.-J. Park and B.T. Cunningham and J.G. Eden}, + title = {Low temperature plasma channels generated in microcavity trenches + with widths of 20\,-\,150\,\textmu{}m and aspect ratios as large + as 10\textsuperscript{4}\,:\,1}, + journal = {Appl. Phys. Lett.}, + year = {2008}, + volume = {92}, + pages = {1397\,-\,1402}, + doi = {10.1063/1.2827197}, + file = {:DBD\\Lu-Plasma channels-2008.pdf:PDF}, + url = {http://dx.doi.org/10.1063/1.2827197} +} + +@ARTICLE{Lu07, + author = {M. Lu and S.-J. Park and B.T. Cunningham and J.G. Eden}, + title = {Microcavity Plasma Devices and Arrays Fabricated by Plastic-Based + Replica Molding}, + journal = {J. Microelectromech. Syst.}, + year = {2007}, + volume = {16}, + pages = {1397\,-\,1402}, + doi = {10.1109/JMEMS.2006.886034}, + file = {:DBD\\Lu-Microcavities by molding-2007.pdf:PDF}, + url = {http://dx.doi.org/10.1109/JMEMS.2006.886034} +} + +@PHDTHESIS{Luca09, + author = {N. Lucas}, + title = {Microplasma Stamps - An Atmospheric-Pressure Plasma Source for the + Area-Selective Modification of Surfaces}, + school = {Institute for Microtechnology, TU Braunschweig}, + year = {2009}, + url = {http://www.shaker.de/Online-Gesamtkatalog/details.asp?ID=8983398&CC=3631&ISBN=3-8322-8008-1} +} + +@ARTICLE{Luca08-2, + author = {N. Lucas and V. Ermel and M. Kurrat and S. Büttgenbach}, + title = {Microplasma stamps for selective surface modification: design and + characterization}, + journal = {J. Phys. D: Appl. Phys.}, + year = {2008}, + volume = {41}, + pages = {215202 (7pp)}, + doi = {10.1088/0022-3727/41/21/215202}, + file = {:DBD\\Lucas-PDMS-Stamps-2.pdf:PDF}, + url = {http://dx.doi.org/10.1088/0022-3727/41/21/215202} +} + +@ARTICLE{Luca08-1, + author = {N. Lucas and A. Hinze and C.-P. Klages and S. Büttgenbach}, + title = {Design and optimization of dielectric barrier discharge microplasma + stamps}, + journal = {J. Phys. D: Appl. Phys.}, + year = {2008}, + volume = {41}, + pages = {194012 (5pp)}, + doi = {10.1088/0022-3727/41/19/194012}, + file = {:DBD\\Lucas-PDMS-Stamps-1.pdf:PDF}, + url = {http://dx.doi.org/10.1088/0022-3727/41/19/194012} +} + +@ARTICLE{Malk08, + author = {G.S. Malkov and others}, + title = {Pulsed-Plasma-Induced Micropatterning with Alternating Hydrophilic + and Hydrophobic Surface Chemistries}, + journal = {Plasma Process. Polym.}, + year = {2008}, + volume = {5}, + pages = {129\,-\,145}, + number = {2}, + doi = {10.1002/ppap.200700118}, + file = {:DBD\\Malkov-SEM mask pattern-2008.pdf:PDF}, + publisher = {John Wiley \& Sons, Ltd}, + url = {http://dx.doi.org/10.1002/ppap.200700118} +} + +@ARTICLE{Marq1963, + author = {Donald W. Marquardt}, + title = {An Algorithm for Least-Squares Estimation of Nonlinear Parameters}, + journal = {SIAM Journal on Applied Mathematics}, + year = {1963}, + volume = {11}, + pages = {431\,-\,441}, + number = {2}, + doi = {10.1137/0111030}, + publisher = {SIAM}, + url = {http://dx.doi.org/10.1137\%2F0111030} +} + +@ARTICLE{Mart04, + author = {C.R. Martin and I.A. Aksay}, + title = {Submicrometer-scale patterning of ceramic thin films}, + journal = {J. of Electroceramics}, + year = {2004}, + volume = {12}, + pages = {53\,-\,68}, + number = {1}, + doi = {10.1023/B:JECR.0000034001.15359.98}, + file = {:Allgemein\\Martin-Patterning-Ceramics-Overview-2004.pdf:PDF}, + publisher = {Springer}, + url = {http://dx.doi.org/10.1023/B:JECR.0000034001.15359.98} +} + +@ARTICLE{Mart1997, + author = {C. Martinet and V. Paillard and A. Gagnaire and J. Joseph}, + title = {Deposition of $\mathrm{SiO_2}$ and $\mathrm{TiO_2}$ thin films by + plasma enhanced chemical vapor deposition for antireflection coating}, + journal = {J. Non-Cryst. Solids}, + year = {1997}, + volume = {216}, + pages = {77\,-\,82}, + doi = {10.1016/S0022-3093(97)00175-0}, + file = {:DBD\\Martinet-SiO2-TiO2-1997.pdf:PDF}, + url = {\href{http://dx.doi.org/10.1016/S0022-3093(97)00175-0}{http://dx.doi.org/10.1016/S0022-3093(97)00175-0}} +} + +@ARTICLE{Mass01, + author = {F. Massines and others}, + title = {The role of dielectric barrier discharge atmosphere and physics on + polypropylene surface treatment}, + journal = {Plasmas and Polymers}, + year = {2001}, + volume = {6}, + pages = {35\,-\,49}, + number = {1}, + doi = {10.1023/A:1011365306501}, + file = {:DBD\\Massines-oxygen-impurities-2001.pdf:PDF}, + url = {http://dx.doi.org/10.1023/A:1011365306501} +} + +@ARTICLE{Masu1998, + author = {T. Masuzawa and T. Takawashi}, + title = {{Recent trends in EDM/ECM technologies in Japan}}, + journal = {VDI BERICHTE}, + year = {1998}, + volume = {1405}, + pages = {1\,-\,16}, + publisher = {VDI VERLAG GMBH} +} + +@ARTICLE{Mata06, + author = {A. Mata and A.J. Fleischmann and S. Roy}, + title = {Fabrication of multi-layer {SU-8} microstructures}, + journal = {J. Micromech. Microeng.}, + year = {2006}, + volume = {16}, + pages = {276\,-\,284}, + doi = {10.1088/0960-1317/16/2/012}, + file = {SU-8-Aspektverhaeltnis-jmm6_2_012.pdf:Photolacke\\SU-8-Aspektverhaeltnis-jmm6_2_012.pdf:PDF}, + url = {http://dx.doi.org/10.1088/0960-1317/16/2/012} +} + +@ARTICLE{Melz1996, + author = {K.A. Melzak and C.S. Sherwood and R.F.B. Turner and C.A. Haynes}, + title = {Driving forces for {DNA} adsorption to silica in perchlorate solutions}, + journal = {J. Colloid Interface Sci.}, + year = {1996}, + volume = {181}, + pages = {635\,-\,644}, + number = {2}, + doi = {10.1006/jcis.1996.0421}, + file = {:Allgemein\\Melzak-DNA-SiOx-Adsorption-1996.pdf:PDF}, + publisher = {Elsevier}, + url = {\newline http://dx.doi.org/10.1006/jcis.1996.0421} +} + +@CONFERENCE{Menz02, + author = {W. Menz and R. Förster and A. Schoth and C. Müller}, + title = {Non-conventional machining for microsystems}, + booktitle = {Proc. 3rd Euspen Int. Conf.}, + year = {2002}, + pages = {37} +} + +@ARTICLE{Mira00, + author = {S.F. Miralaï and others}, + title = {Electrical and Optical Diagnostics of Dielectric Barrier Discharges + {(DBD) in He and N2} for Polymer Treatment}, + journal = {Plasmas and Polymers}, + year = {2000}, + volume = {5}, + pages = {63\,-\,77}, + number = {2}, + doi = {10.1023/A:1009531831404}, + file = {:DBD\\Miralai-oxygen-impurity-2000.pdf:PDF}, + url = {http://dx.doi.org/10.1023/A:1009531831404} +} + +@INPROCEEDINGS{TOK06, + author = {K. Misumi and others}, + title = {Faster sensitivity and non-antimonite permanent photoresist for {MEMS}}, + booktitle = {Advances in Resist Technology and Processing XXIII}, + year = {2006}, + editor = {Qinghuang Lin}, + volume = {6153}, + series = {Proceedings of SPIE}, + pages = {61534F}, + organization = {SPIE}, + doi = {10.1117/12.656249}, + file = {TOK-Faster Sensitivity and Non-Antimonite Permanent Photoresist for MEMS.pdf:Photolacke\\TOK-Faster Sensitivity and Non-Antimonite Permanent Photoresist for MEMS.pdf:PDF}, + url = {http://dx.doi.org/10.1117/12.656249} +} + +@ARTICLE{TOK06-2, + author = {K. Misumi and K. Saito and A. Yamanouchi and T. Senzaki and H. Honma}, + title = {Minute Tunnel Structure Formation with Permanent Film Photoresist}, + journal = {J. Photopolym. Sci. Technol.}, + year = {2006}, + volume = {19}, + pages = {57\,-\,62}, + doi = {10.2494/photopolymer.19.57}, + file = {TOK-Minute tunnel structure formation with permanent film photoresist.pdf:Photolacke\\TOK-Minute tunnel structure formation with permanent film photoresist.pdf:PDF}, + url = {\newline http://dx.doi.org/10.2494/photopolymer.19.57} +} + +@ARTICLE{Mull1988, + author = {W.M. Mullins and B.L. Averbach}, + title = {Surface properties of silicon and aluminum oxide powders}, + journal = {Surface Science}, + year = {1988}, + volume = {206}, + pages = {41\,-\,51}, + number = {1-2}, + doi = {10.1016/0039-6028(88)90013-1}, + file = {:DBD\\Mullins-Work function of AluOxide-1988.pdf:PDF}, + publisher = {Elsevier}, + url = {\href{http://dx.doi.org/10.1016/0039-6028(88)90013-1}{http://dx.doi.org/10.1016/0039-6028(88)90013-1}} +} + +@ARTICLE{Murp1956, + author = {E.L. Murphy and R.H. {Good, Jr.}}, + title = {Thermionic Emission, Field Emission, and the Transition Region}, + journal = {Phys. Rev.}, + year = {1956}, + volume = {102}, + pages = {1464 - 1473}, + doi = {10.1103/PhysRev.102.1464}, + file = {:DBD\\Murphy,Good - Thermionic Emission, Field Emission, and the Transition Region.pdf:PDF}, + url = {http://dx.doi.org/10.1103/PhysRev.102.1464} +} + +@ARTICLE{Muel1999, + author = {I. Müller and C. Punset and E. Ammelt and H.-G. Purwins and J.P. + Boeuf}, + title = {Self-Organized Filaments in Dielectric Barrier Glow Discharges}, + journal = {IEEE Trans. Plasma Sci.}, + year = {1999}, + volume = {27}, + pages = {20\,-\,21}, + doi = {10.1109/27.763004}, + file = {Müller-Filaments-glow-discharge-1999.pdf:DBD\\Müller-Filaments-glow-discharge-1999.pdf:PDF}, + url = {http://dx.doi.org/10.1109/27.763004} +} + +@ARTICLE{Naka01, + author = {A. Nakajima and K. Hashimoto and T. Watanabe}, + title = {Recent studies on super-hydrophobic films}, + journal = {Monatshefte für Chemie\,/\,Chemical Monthly}, + year = {2001}, + volume = {132}, + pages = {31\,-\,41}, + doi = {10.1007/s007060170142}, + file = {:Allgemein\\TiO2-hydrophobic-Nakajima-2001.pdf:PDF}, + publisher = {Springer}, + url = {http://dx.doi.org/10.1007/s007060170142} +} + +@ARTICLE{Niem1995, + author = {L. Niemeyer}, + title = {A generalized approach to partial discharge modeling}, + journal = {IEEE Transactions on Dielectrics and Electrical Insulation}, + year = {1995}, + volume = {2}, + pages = {510\,-\,528}, + number = {4}, + doi = {10.1109/94.407017}, + file = {:DBD\\Niemeyer 95 generalized approach partial discharges.pdf:PDF}, + url = {http://dx.doi.org/10.1109/94.407017} +} + +@ARTICLE{Noes04, + author = {M. Noeske and J. Degenhardt and S. Strudthoff and U. Lommatzsch}, + title = {Plasma jet treatment of five polymers at atmospheric pressure: surface + modifications and the relevance for adhesion}, + journal = {International Journal of Adhesion \& Adhesives}, + year = {2004}, + volume = {24}, + pages = {171\,-\,177}, + doi = {10.1016/j.ijadhadh.2003.09.006}, + file = {:DBD\\Noeske03-plasma jet treatment.pdf:PDF}, + url = {http://dx.doi.org/10.1016/j.ijadhadh.2003.09.006} +} + +@ARTICLE{Nord1928, + author = {L. Nordheim}, + title = {Zur Theorie der thermischen Emission und der Reflexion von Elektronen + an Metallen}, + journal = {Zeitschrift für Physik A Hadrons and Nuclei}, + year = {1928}, + volume = {46}, + pages = {833\,-\,855}, + number = {11\,-\,12}, + month = {November}, + doi = {10.1007/BF01391020}, + file = {:DBD\\Nordheim-1928.pdf:PDF}, + url = {http://dx.doi.org/10.1007/BF01391020} +} + +@CONFERENCE{Nuss09, + author = {D. Nußbaum and D. Herrmann and T. Knoll and T. Velten}, + title = {Micromixing Structures for Lab-on Chip Applications: Fabrication + and Simulation of 90° Zigzag Microchann els in Dry Film Resist}, + booktitle = {4M\,/\,ICOMM 2009 Conference}, + year = {2009}, + pages = {215\,-\,218}, + doi = {10.1243/17547164C0012009041}, + file = {:Photolacke\\Nußbaum-PerMX-2009.pdf:PDF}, + owner = {usti}, + url = {http://dx.doi.org/10.1243/17547164C0012009041} +} + +@ARTICLE{Obri01, + author = {J. O'Brien}, + title = {Advanced photoresist technologies for microsystems}, + journal = {J. Micromech. Microeng.}, + year = {2001}, + volume = {11}, + pages = {353\,-\,358}, + doi = {10.1088/0960-1317/11/4/312}, + file = {OBrien01.pdf:Photolacke\\OBrien01.pdf:PDF}, + url = {http://dx.doi.org/10.1088/0960-1317/11/4/312} +} + +@ARTICLE{Ohl1999, + author = {A. Ohl and K. Schröder}, + title = {Plasma-induced chemical micropatterning for cell culturing applications: + a brief review}, + journal = {Surf. Coat. Technol.}, + year = {1999}, + volume = {116}, + pages = {820\,-\,830}, + doi = {10.1016/S0257-8972(99)00150-4}, + file = {:DBD\\Ohl-SEM grid pattern-1999.pdf:PDF}, + publisher = {Elsevier}, + url = {\href{http://dx.doi.org/10.1016/S0257-8972(99)00150-4}{http://dx.doi.org/10.1016/S0257-8972(99)00150-4}} +} + +@PHDTHESIS{Olss1998, + author = {Anders Olsson}, + title = {Valve-less Diffuser Micropumps}, + school = {School of Electrical Engineering, Royal Institute of Technology, + Stockholm, Sweden}, + year = {1998}, + file = {:Allgemein\\1998 Valve-less diffuser micropumps.pdf:PDF}, + url = {http://www.s3.kth.se/instrlab/research/dissertations/pdf/andersodoc.pdf} +} + +@ARTICLE{Pan02, + author = {C.-T. Pan and H. Yang and S.-C. Shen and M.-C. Chou and H.-P. Chou}, + title = {A low-temperature wafer bonding technique using patternable materials}, + journal = {J. Micromech. Microeng.}, + year = {2002}, + volume = {12}, + pages = {611\,-\,615}, + doi = {10.1088/0960-1317/12/5/315}, + file = {Wafer-Bonding-Pan.pdf:Photolacke\\Wafer-Bonding-Pan.pdf:PDF}, + url = {http://dx.doi.org/10.1088/0960-1317/12/5/315} +} + +@ARTICLE{Park01, + author = {J. Park and I. Henins and H.W. Herrmann and G.S. Selwyn}, + title = {Discharge phenomena of an atmospheric pressure radio-frequency capacitive + plasma source}, + journal = {J. Appl. Phys.}, + year = {2001}, + volume = {89}, + pages = {20\,-\,28}, + doi = {10.1063/1.1323753}, + file = {:DBD\\Park01-Discharge phenomena.pdf:PDF}, + url = {http://dx.doi.org/10.1063/1.1323753} +} + +@ARTICLE{Park05, + author = {S.-J. Park and K.S. Kim and J.G. Eden}, + title = {Nanoporous alumina as a dielectric for microcavity plasma devices: + Multilayer {Al/AlO} structures}, + journal = {Appl. Phys. Lett.}, + year = {2005}, + volume = {86}, + pages = {221501}, + doi = {10.1063/1.1923747}, + file = {:DBD\\Park-Cavitiy Al2O3-2005.pdf:PDF}, + publisher = {AIP}, + url = {http://dx.doi.org/10.1063/1.1923747} +} + +@ARTICLE{Pasc1889, + author = {F. Paschen}, + title = {{Ueber die zum Funkenübergang in Luft, Wasserstoff und Kohlensäure + bei verschiedenen Drucken erforderliche Potentialdifferenz}}, + journal = {Annalen der Physik}, + year = {1889}, + volume = {273}, + pages = {69\,-\,96}, + number = {5}, + doi = {10.1002/andp.18892730505}, + file = {:DBD\\Paschen-1889.pdf:PDF}, + url = {http://dx.doi.org/10.1002/andp.18892730505} +} + +@ARTICLE{Payn02, + author = {W.G. Payne and B.W. James and I.S. Falconer}, + title = {The Growth and Decay of Miniature Dielectric Barrier Discharges in + Helium, Neon, and Argon}, + journal = {IEEE Trans. Plasma Sci.}, + year = {2002}, + volume = {30}, + pages = {170\,-\,171}, + doi = {10.1109/TPS.2002.1003978}, + file = {Payne-Discharge-Growth-2002.pdf:DBD\\Payne-Discharge-Growth-2002.pdf:PDF}, + url = {http://dx.doi.org/10.1109/TPS.2002.1003978} +} + +@MISC{PCI, + author = {{PCI-SIG}}, + title = {{PCI} Conventional specifications}, + howpublished = {Internet:\newline http://www.pcisig.com/specifications/conventional + (accessed 08-01-2010)}, + url = {http://www.pcisig.com/specifications/conventional} +} + +@ARTICLE{Pena04, + author = {C. Penache and C. Gessner and T. Betker and V. Bartels and C.-P. + Klages}, + title = {Plasma printing: patterned surface functionalisation and coating + at atmospheric pressure}, + journal = {IEE Proc.-Nanobiotechnol.}, + year = {2004}, + volume = {151}, + pages = {139\,-\,144}, + booktitle = {Proceedings. 2nd VDE World Microtechnologies Congress, October 13 + - 15, 2003}, + doi = {10.1049/ip-nbt:20040836}, + file = {:DBD\\Penache04-Printing.pdf:PDF}, + url = {http://dx.doi.org/10.1049/ip-nbt:20040836} +} + +@ARTICLE{Phel1999, + author = {A.V. Phelps and Z.Lj. Petrovic}, + title = {Cold-cathode discharges and breakdown in argon: surface and gas phase + production of secondary electrons}, + journal = {Plasma Sources Sci. Technol.}, + year = {1999}, + volume = {8}, + pages = {21\,-\,44}, + doi = {10.1088/0963-0252/8/3/201}, + file = {:DBD\\Phelps-Petrovic-Secondary-emission-1999.pdf:PDF}, + publisher = {IOP PUBLISHING}, + url = {http://dx.doi.org/10.1088/0963-0252/8/3/201} +} + +@INPROCEEDINGS{Rada07, + author = {A.D. Radadia and L. Cao and H.-K. Jeong and M.A. Shannon and R.I. + Masel}, + title = {A {3D} Micromoxer Fabricated with Dry Film Resist}, + booktitle = {Proc. of MEMS 2007}, + year = {2007}, + pages = {361\,-\,364}, + doi = {10.1109/MEMSYS.2007.4433110}, + file = {:Photolacke\\Radadia-3D micromixer-2007.pdf:PDF}, + url = {http://dx.doi.org/10.1109/MEMSYS.2007.4433110} +} + +@ARTICLE{Radm07, + author = {M. Radmilovic-Radjenovic and Z.L. Petrovic and B. Radjenovic}, + title = {Modelling of breakdown behavior by {PIC/MCC} code with improved secondary + emission models}, + journal = {J. Phys.: Conf. Ser.}, + year = {2007}, + volume = {71}, + pages = {012007}, + number = {1}, + booktitle = {Journal of Physics: Conference Series}, + doi = {10.1088/1742-6596/71/1/012007}, + file = {:DBD\\Radjenovic-secondary-emisson-2007.pdf:PDF}, + url = {http://dx.doi.org/10.1088/1742-6596/71/1/012007} +} + +@ARTICLE{Radu03, + author = {I. Radu and R. Bartnikas and G. Czeremuszkin and M.R. Wertheimer}, + title = {Diagnostics of Dielectric Barrier Discharges in Noble Gases: Atmospheric + Pressure Glow and Pseudoglow Discharges and Spatio-Temporal Patterns}, + journal = {IEEE Trans. Plasma Sci.}, + year = {2003}, + volume = {31}, + pages = {411\,-\,421}, + number = {3}, + doi = {10.1109/TPS.2003.811647}, + file = {:DBD\\Radu-filament-noble-gases-2003.pdf:PDF}, + url = {http://dx.doi.org/10.1109/TPS.2003.811647} +} + +@ARTICLE{Radu05, + author = {I. Radu and R. Bartnikas and M.R. Wertheimer}, + title = {Diagnostics and modelling of noble gas atmospheric pressure dielectric + barrier discharges in homogeneous or diverging electric fields}, + journal = {J. Phys. D: Appl. Phys.}, + year = {2005}, + volume = {38}, + pages = {539\,-\,546}, + doi = {10.1088/0022-3727/38/4/005}, + file = {Radu-filament-noble-gases-2005.pdf:DBD\\Radu-filament-noble-gases-2005.pdf:PDF}, + url = {http://dx.doi.org/10.1088/0022-3727/38/4/005} +} + +@ARTICLE{Rao05, + author = {R.B. Rao and K.L. Krafcik and A.M. Morales and J. Lewis}, + title = {Microfabricated deposition nozzles for direct-write assembly of three-dimensional + periodic structures}, + journal = {Adv. Mater.}, + year = {2005}, + volume = {17}, + pages = {289\,-\,293}, + number = {3}, + doi = {10.1002/adma.200400514}, + file = {:Allgemein\\Rao-3D-ink-hexagonal-2005.pdf:PDF}, + publisher = {Wiley-VCH Verlag GmbH}, + url = {http://dx.doi.org/10.1002/adma.200400514} +} + +@BOOK{Rich1921, + title = {The Emission of Electricity from Hot Bodies}, + publisher = {Longmans, Green and co.}, + year = {1921}, + author = {O.W. Richardson}, + url = {http://www.worldcat.org/wcpa/oclc/946804} +} + +@ARTICLE{Sarr06, + author = {C. Sarra-Bournet and S. Turgeon and D. Mantovani and G. Laroche}, + title = {A study of atmospheric pressure plasma discharges for surface functionalization + of {PTFE} used in biomedical applications}, + journal = {J. Phys. D: Appl. Phys.}, + year = {2006}, + volume = {39}, + pages = {3461\,-\,3469}, + number = {16}, + doi = {10.1088/0022-3727/39/16/S03}, + file = {:DBD\\Sarra-Bournet-treatment-time-2006.pdf:PDF}, + url = {http://dx.doi.org/10.1088/0022-3727/39/16/S03} +} + +@ARTICLE{Sawa1995, + author = {Y. Sawada and S. Ogawa and M. Kogoma}, + title = {Synthesis of plasma-polymerized tetraethoxysilane and hexamethyldisiloxane + films prepared by atmospheric pressure glow discharge}, + journal = {J. Phys. D: Appl. Phys.}, + year = {1995}, + volume = {28}, + pages = {1661\,-\,1661}, + doi = {10.1088/0022-3727/28/8/015}, + file = {:DBD\\Sawada-TEOS-SiOx-1995.pdf:PDF}, + publisher = {IOP PUBLISHING LTD}, + url = {http://dx.doi.org/10.1088/0022-3727/28/8/015} +} + +@ARTICLE{Sche07, + author = {A. Schenk and others}, + title = {Microstructured Electrode Arrays: Optical analysis of the Glow Discharge + in a Magnified Electrode Gap}, + journal = {Plasma Process. Polym.}, + year = {2007}, + volume = {4}, + pages = {S927\,-\,S930}, + doi = {10.1002/ppap.200732301}, + file = {:DBD\\Schenk-Optical-Analysis.pdf:PDF}, + url = {http://dx.doi.org/10.1002/ppap.200732301} +} + +@ARTICLE{Scho04, + author = {K.H. Schoenbach and M. Moselhy and W. Shi}, + title = {Self-organization in cathode boundary layer microdischarges}, + journal = {Plasma Sources Sci. Technol.}, + year = {2004}, + volume = {13}, + pages = {177\,-\,185}, + number = {1}, + doi = {10.1088/0963-0252/13/1/023}, + file = {:DBD\\Schoenbach-FilamentDiameter-2004.pdf:PDF}, + publisher = {Bristol, UK: IOP Pub.; Woodbury, NY: American Institute of Physics, + c1991-}, + url = {http://dx.doi.org/10.1088/0963-0252/13/1/023} +} + +@ARTICLE{Scho1999, + author = {U.P Schönholzer and L.J. Gauckler}, + title = {Ceramic parts patterned in the micrometer range}, + journal = {Adv. Mater.}, + year = {1999}, + volume = {11}, + pages = {630\,-\,632}, + number = {8}, + file = {:Allgemein\\Schoenholzer-KeramikStrukturiertSintern1-1999.pdf:PDF}, + publisher = {WILEY-VCH Verlag GmbH Weinheim}, + url = {\href{http://www.cheric.org/research/tech/periodicals/doi.php?art_seq=646499}{http://www.cheric.org/research/tech/periodicals/doi.php?art\_seq=\newline 646499}} +} + +@ARTICLE{Smit00, + author = {R.C. Smith and others}, + title = {Chemical vapour deposition of the oxides of titanium, zirconium and + hafnium for use as high-k materials in microelectronic devices. A + carbon-free precursor for the synthesis of hafnium dioxide}, + journal = {Adv. Mater. Opt. and Electron.}, + year = {2000}, + volume = {10}, + pages = {105\,-\,114}, + number = {3-5}, + doi = {10.1002/1099-0712(200005/10)10:3/5<105::AID-AMO402>3.0.CO;2-J}, + file = {:DBD\\Smith-Ti-and-others-2000.pdf:PDF}, + publisher = {John Wiley \& Sons, Ltd. Chichester, UK}, + url = {\href{http://dx.doi.org/10.1002/1099-0712(200005/10)10:3/5<105::AID-AMO402>3.0.CO;2-J}{http://dx.doi.org/10.1002/1099-0712(200005/10)10:3/5<105::AID-AMO402>3.0.CO;2-J}} +} + +@BOOK{Socr1994, + title = {Infrared and Raman characteristic group frequencies: tables and charts}, + publisher = {John Wiley \& Sons}, + year = {1994}, + author = {G. Socrates}, + edition = {2nd} +} + +@MISC{Lightning, + author = {J. R. Southern}, + title = {Toronto thunderstorm}, + howpublished = {Internet: \newline http://en.wikipedia.org/wiki/File:Krunkwerke\_-\_IMG\_4515\_\%28by-sa\%29.jpg + (accessed 07-09-2009)}, + url = {http://en.wikipedia.org/wiki/File:Krunkwerke_-_IMG_4515_%28by-sa%29.jpg} +} + +@CONFERENCE{Stal07, + author = {O. Stalter and B. Burger and S. Lehrmann}, + title = {{Silicon Carbide (SiC) D-MOS for grid-feeding solar-inverters}}, + booktitle = {European Conference on Power Electronics and Applications, 2007}, + year = {2007}, + pages = {1\,-\,10}, + doi = {10.1109/EPE.2007.4417654}, + file = {:Allgemein\\Stalter-SiC-Inverters-2007.pdf:PDF}, + url = {http://dx.doi.org/10.1109/EPE.2007.4417654} +} + +@ARTICLE{Star06, + author = {S.M. Starikovskaia}, + title = {Plasma assisted ignition and combustion}, + journal = {J. Phys. D: Appl. Phys.}, + year = {2006}, + volume = {39}, + pages = {R265\,-\,R299}, + number = {16}, + doi = {10.1088/0022-3727/39/16/R01}, + file = {:DBD\\Starikovskaia-Streamer-overview-2006.pdf:PDF}, + url = {http://dx.doi.org/10.1088/0022-3727/39/16/R01} +} + +@ARTICLE{Step07, + author = {K. Stephan and others}, + title = {Fast prototyping using a dry film photoresist: microfabrication of + soft-lithography masters for microfluidic structures}, + journal = {J. Micromech. Microeng.}, + year = {2007}, + volume = {17}, + pages = {N69\,-\,N74}, + doi = {10.1088/0960-1317/17/10/N01}, + file = {:Photolacke\\Stephan-DFR-Etertec-HQ-2007.pdf:PDF}, + url = {http://dx.doi.org/10.1088/0960-1317/17/10/N01} +} + +@ARTICLE{Stoe10, + author = {U. Stöhr and others}, + title = {Porous photoresist stamps for selective plasma treatment}, + journal = {Plasma Processes Polym.}, + year = {2010}, + volume = {7}, + pages = {9\,-\,15}, + number = {1}, + doi = {10.1002/ppap.200900063}, + file = {:DBD\\Stöhr-PlasmaStampSinterMetal-2010.pdf:PDF}, + url = {\newline http://dx.doi.org/10.1002/ppap.200900063} +} + +@ARTICLE{Stoe09, + author = {Uwe Stöhr and others}, + title = {Multilayer Photoresist Stamps for Selective Plasma Treatment in Micrometer + Scales}, + journal = {Plasma Process. Polym.}, + year = {2009}, + volume = {6}, + pages = {228\,-\,233}, + number = {4}, + doi = {10.1002/ppap.200800217}, + file = {:DBD\\PlasmaPaper-Photoresist-finally-printed.pdf:PDF}, + url = {http://dx.doi.org/10.1002/ppap.200800217} +} + +@ARTICLE{Stoe08, + author = {U. Stöhr and P. Vulto and P. Hoppe and G. Urban and H. Reinecke}, + title = {High-resolution permanent photoresist laminate for microsystem applications}, + journal = {J. Micro/Nanolith. MEMS MOEMS}, + year = {2008}, + volume = {7}, + pages = {033009}, + doi = {10.1117/1.2964217}, + file = {:Photolacke\\TMMFPaperSPIE-2Draft.pdf:PDF}, + url = {http://dx.doi.org/10.1117/1.2964217} +} + +@ARTICLE{Suk07, + author = {J.W. Suk and J. Cho}, + title = {Capillary flow control using hydrophobic patterns}, + journal = {J. Micromech. Microeng.}, + year = {2007}, + volume = {17}, + pages = {N11\,-\,N15}, + number = {4}, + doi = {10.1088/0960-1317/17/4/N01}, + file = {:Allgemein\\Suk-hydrophobic-channels-2007.pdf:PDF}, + url = {http://dx.doi.org/10.1088/0960-1317/17/4/N01} +} + +@ARTICLE{Tan06, + author = {H.M.L. Tan and T. Akagi and T. Ichiki}, + title = {Localized Plasma Treatment of Poly(dimethylsiloxane) Surfaces and + Its Application to Controlled Cell Cultivation}, + journal = {J. Photopolym. Sci. Technol.}, + year = {2006}, + volume = {19}, + pages = {245\,-\,250}, + doi = {10.2494/photopolymer.19.245}, + file = {:DBD\\Tan06-Plasmajet.pdf:PDF}, + url = {http://dx.doi.org/10.2494/photopolymer.19.245} +} + +@MISC{LyX, + author = {{The LyX Team}}, + title = {LyX 1.6.x}, + howpublished = {Internet: http://www.lyx.org}, + url = {http://www.lyx.org} +} + +@ARTICLE{Ther03, + author = {D. Therriault and S.R. White and J.A. Lewis}, + title = {Chaotic mixing in three-dimensional microvascular networks fabricated + by direct-write assembly}, + journal = {Nature Materials}, + year = {2003}, + volume = {2}, + pages = {265\,-\,271}, + number = {4}, + doi = {10.1038/nmat863}, + file = {:Allgemein\\Therriault-Ink-Channels-2003.pdf:PDF}, + publisher = {Nature Publishing Group}, + url = {http://dx.doi.org/10.1038/nmat863} +} + +@INPROCEEDINGS{Thom06, + author = {M. Thomas and M. Eichler and C.-P. Klages}, + title = {Coating with Atmospheric Pressure Plasma Processes: From Large Area + to \textmu{}-Structures}, + booktitle = {49th Annual Technical Conference Proceedings}, + year = {2006}, + organization = {Society of Vacuum Coaters}, + url = {http://tinyurl.com/Thomas06} +} + +@ARTICLE{Thom07, + author = {M. Thomas and M. von Hausen and C.-P. Klages and P. Baumhof}, + title = {Generation of Stable Coatings with Carboxylic Groups by Copolymerization + of {MAA} and {VTMS} using {DBD} at Atmospheric Pressure}, + journal = {Plasma Process. Polym.}, + year = {2007}, + volume = {4}, + pages = {S475\,-\,S481}, + doi = {10.1002/ppap.200731210}, + file = {:DBD\\Thomas-Carboxy-groups-2007.pdf:PDF}, + publisher = {WILEY-VCH Verlag Weinheim}, + url = {http://dx.doi.org/10.1002/ppap.200731210} +} + +@BOOK{Town1915, + title = {Electricity in Gases}, + publisher = {Clarendon Press}, + year = {1915}, + author = {J.S. Townsend}, + url = {http://www.worldcat.org/wcpa/oclc/4294747} +} + +@BOOK{Town1910, + title = {The Theory of Ionization of Gases by Collision}, + publisher = {Constable}, + year = {1910}, + author = {J.S. Townsend}, + url = {http://www.worldcat.org/wcpa/oclc/8460026} +} + +@ARTICLE{Tsai06-2, + author = {Y.-C. Tsai and H.-P. Jen and K.-W. Lin and Y.-Z. Hsie}, + title = {Fabrication of microfluidic devices using dry film photoresist for + microchip capillary electrophoresis}, + journal = {J. Chromatogr. A}, + year = {2006}, + volume = {1111}, + pages = {267\,-\,271}, + doi = {0.1016/j.chroma.2005.12.003}, + file = {AF-5000-Photolack-2.pdf:Photolacke\\AF-5000-Photolack-2.pdf:PDF}, + url = {http://dx.doi.org/10.1016/j.chroma.2005.12.003} +} + +@ARTICLE{Tsai06-1, + author = {Y.-C. Tsai and S.-J. Yang and H.-T. Lee and H.-P. Jen and Y.-Z. Hsieh}, + title = {Fabrication of a Flexible and Disposable Microreactor Using a Dry + Film Photoresist}, + journal = {J. Chin. Chem. Soc.}, + year = {2006}, + volume = {53}, + pages = {683\,-\,688}, + file = {AF-5000-Photolack.pdf:Photolacke\\AF-5000-Photolack.pdf:PDF}, + url = {http://nr.stpi.org.tw/ejournal/ChiChemSociety/2006/EJ52-2006-683.pdf} +} + +@ARTICLE{Uden1972, + author = {S. Udenfriend and others}, + title = {Fluorescamine: A Reagent for Assay of Amino Acids, Peptides, Proteins, + and Primary Amines in the Picomole Range}, + journal = {Science}, + year = {1972}, + volume = {178}, + pages = {871\,-\,872}, + doi = {10.1126/science.178.4063.871}, + file = {:Allgemein\\Udenfriend-Fluorescamine-1972.pdf:PDF}, + url = {http://dx.doi.org/10.1126/science.178.4063.871} +} + +@ARTICLE{Velt05, + author = {T. Velten and others}, + title = {Packaging of Bio-MEMS: Strategies, Technologies, and Applications}, + journal = {IEEE trans. adv. packag.}, + year = {2005}, + volume = {28}, + pages = {533\,-\,546}, + doi = {10.1109/TADVP.2005.858427}, + file = {Velten05-review.pdf:Photolacke\\Velten05-review.pdf:PDF}, + url = {http://dx.doi.org/10.1109/TADVP.2005.858427} +} + +@ARTICLE{Vora05, + author = {K.D. Vora and B.Y. Shew and E.C. Harvey and J.P. Hayes and A.G. Peele}, + title = {{Specification of mechanical support structures to prevent SU-8 stiction + in high aspect ratio structures}}, + journal = {J. Micromech. Microeng.}, + year = {2005}, + volume = {15}, + pages = {978\,-\,983}, + doi = {10.1088/0960-1317/15/5/012}, + file = {SU-8-Aspektverhaeltnis-jmm2005.pdf:Photolacke\\SU-8-Aspektverhaeltnis-jmm2005.pdf:PDF}, + url = {http://dx.doi.org/10.1088/0960-1317/15/5/012} +} + +@CONFERENCE{Vult07, + author = {P. Vulto and G. Igel and G.A. Urban}, + title = {Full wafer fabrication process for microfluidic glass chips with + electroplated electrodes}, + booktitle = {Solid-State Sensors, Actuators and Microsystems Conference, 2007. + TRANSDUCERS 2007.}, + year = {2007}, + pages = {117\,-\,120}, + doi = {10.1109/SENSOR.2007.4300085}, + file = {:Photolacke\\Vult07.pdf:PDF}, + journal = {Solid-State Sensors, Actuators and Microsystems Conference, 2007. + TRANSDUCERS 2007.}, + url = {http://ieeexplore.ieee.org/xpls/abs\_all.jsp?arnumber=4300085} +} + +@INPROCEEDINGS{Vult06-2, + author = {P. Vulto and C. Klaunick and G. Igel and G. Urban}, + title = {{tmRNA} purification by electrophoretic filtration for genomic identification + of bacteria on-a-chip}, + booktitle = {Proceedings of \textmu{}TAS 2006}, + year = {2006}, + volume = {2}, + pages = {377\,-\,379}, + file = {:Photolacke\\tmRNA purification - MicroTAS2006.pdf:PDF} +} + +@ARTICLE{Vult06, + author = {P. Vulto and others}, + title = {Selective sample recovery of DEP-separated cells and particles by + phaseguide-controlled laminar flow}, + journal = {J. Micromech. Microeng.}, + year = {2006}, + volume = {16}, + pages = {1847\,-\,1853}, + doi = {10.1088/0960-1317/16/9/013}, + file = {Vult06.pdf:Photolacke\\Vult06.pdf:PDF}, + url = {http://dx.doi.org/10.1088/0960-1317/16/9/013} +} + +@ARTICLE{Vult05, + author = {P. Vulto and others}, + title = {Microfluidic channel fabrication in dry film resist for production + and prototyping of hybrid chips}, + journal = {Lab on a Chip}, + year = {2005}, + volume = {5}, + pages = {158\,-\,162}, + doi = {10.1039/b411885e}, + file = {Vulto-Ordyl.pdf:Photolacke\\Vulto-Ordyl.pdf:PDF}, + url = {http://dx.doi.org/10.1039/b411885e} +} + +@ARTICLE{Wang06, + author = {C. Wang and X. He}, + title = {Polypropylene surface modification model in atmospheric pressure + dielectric barrier discharge}, + journal = {Surface \& Coatings Technology}, + year = {2006}, + volume = {201}, + pages = {3377\,-\,3384}, + number = {6}, + doi = {10.1016/j.surfcoat.2006.07.205}, + file = {:DBD\\Wang-PP-Contact-Angle-2006.pdf:PDF}, + publisher = {Elsevier}, + url = {http://dx.doi.org/10.1016/j.surfcoat.2006.07.205} +} + +@CONFERENCE{Wash05, + author = {Y. Washio and others}, + title = {Multilayer ultra thick resist development for {MEMS}}, + booktitle = {Proceedings of SPIE}, + year = {2005}, + volume = {5753}, + pages = {959}, + doi = {10.1117/12.600227}, + url = {http://dx.doi.org/10.1117/12.600227} +} + +@ARTICLE{Will04, + author = {J.D. Williams and W. Wang}, + title = {Microfabrication of an electromagnetic power relay using {SU-8 based + UV-LIGA} technology}, + journal = {Microsystem Technologies}, + year = {2004}, + volume = {10}, + pages = {699\,-\,705}, + doi = {10.1007/s00542-004-0396-1}, + file = {SU-8-Aspektverhaeltnis-2.pdf:Photolacke\\SU-8-Aspektverhaeltnis-2.pdf:PDF}, + url = {http://dx.doi.org/10.1007/s00542-004-0396-1} +} + +@ARTICLE{Xu07, + author = {X. Xu and L. Li and S. Wang and L. Zhao and T. Ye}, + title = {Deposition of $\mathrm{SiO_x}$ films with a capacitively-coupled + plasma at atmospheric pressure}, + journal = {Plasma Sources Sci. Technol.}, + year = {2007}, + volume = {16}, + pages = {372\,-\,376}, + number = {2}, + doi = {10.1088/0963-0252/16/2/021}, + file = {:DBD\\Xu-SiOx-DBD-2007.pdf:PDF}, + publisher = {Bristol, UK: IOP Pub.; Woodbury, NY: American Institute of Physics, + c1991-}, + url = {http://dx.doi.org/10.1088/0963-0252/16/2/021} +} + +@ARTICLE{Yama1996, + author = {K. Yamada and T. Haraguchi and T. Kajiyama}, + title = {Plasma-graft polymerization of vinyl monomers with reactive groups + onto a surface of poly (p-phenylene terephthalamide) fiber}, + journal = {J. Appl. Polym. Sci.}, + year = {1996}, + volume = {60}, + pages = {1847\,-\,1853}, + number = {11}, + doi = {10.1002/(SICI)1097-4628(19960613)60:11<1847::AID-APP8>3.0.CO;2-L}, + file = {:DBD\\Yamada-epoxy-grafting-1996.pdf:PDF}, + publisher = {Wiley Subscription Services, Inc., A Wiley Company New York}, + url = {\href{http://dx.doi.org/10.1002/(SICI)1097-4628(19960613)60:11<1847::AID-APP8>3.0.CO;2-L}{http://dx.doi.org/10.1002/(SICI)1097-4628(19960613)60:11<1847::AID-APP8>3.0.CO;2-L}} +} + +@BOOK{Yasu05, + title = {Luminous Chemical Vapor Deposition and Interface Engineering}, + publisher = {Marcel Dekker}, + year = {2005}, + editor = {Arthur T. Hubbard}, + author = {Hirotsugu Yasuda}, + volume = {122}, + series = {Surfactant Science Series}, + edition = {1st} +} + +@ARTICLE{Yu06, + author = {L. Yu and others}, + title = {Adhesive bonding with SU-8 at wafer level for microfluidic devices}, + journal = {J. Phys.: Conf. Ser.}, + year = {2006}, + volume = {34}, + pages = {776\,-\,781}, + doi = {10.1088/1742-6596/34/1/128}, + file = {Yu06.pdf:Photolacke\\Yu06.pdf:PDF}, + url = {http://dx.doi.org/10.1088/1742-6596/34/1/128} +} + +@ARTICLE{Zhan04, + author = {J. Zhang and M.B. Chan-Park and S.R. Conner}, + title = {Effect of exposure dose on the replication fidelity and profile of + very high aspect ratio microchannels in {SU-8}}, + journal = {Lab on a Chip}, + year = {2004}, + volume = {4}, + pages = {646\,-\,653}, + doi = {10.1039/b403304c}, + file = {SU-8-Aspektverhaeltnis-Theorie.pdf:Photolacke\\SU-8-Aspektverhaeltnis-Theorie.pdf:PDF}, + url = {http://dx.doi.org/10.1039/b403304c} +} + +@ARTICLE{Zhan1995, + author = {J. Zhang. and K. Kato and Y. Uyama and Y. Ikada}, + title = {Surface graft polymerization of glycidyl methacrylate onto polyethylene + and the adhesion with epoxy resin}, + journal = {J. Polymer Sci. Polymer Chem.}, + year = {1995}, + volume = {33}, + pages = {2629\,-\,2638}, + number = {15}, + doi = {10.1002/pola.1995.080331509}, + file = {:DBD\\Zhang-epoxy-grafting-PE-1995.pdf:PDF}, + publisher = {John Wiley \& Sons, Inc. New York}, + url = {http://dx.doi.org/10.1002/pola.1995.080331509} +} + +@ARTICLE{Zhao1999, + author = {Y. Zhao and M.-W. Urban}, + title = {Spectroscopic studies of microwave plasma reactions of maleic anhydride + on poly (vinylidene fluoride) surfaces: crystallinity and surface + reactions}, + journal = {Langmuir}, + year = {1999}, + volume = {15}, + pages = {3538\,-\,3544}, + number = {10}, + doi = {10.1021/la981310m}, + file = {:DBD\\Zhao-Carboxy-on-PVDF-1999.pdf:PDF}, + url = {http://dx.doi.org/10.1021/la981310m} +} + +@ARTICLE{Zou01, + author = {X.P. Zou and E.T. Kang and K.G. Neoh and C.Q. Cui and T.B. Lim}, + title = {Surface modification of poly (tetrafluoroethylene) films by plasma + polymerization of glycidyl methacrylate for adhesion enhancement + with evaporated copper}, + journal = {Polymer}, + year = {2001}, + volume = {42}, + pages = {6409\,-\,6418}, + number = {15}, + doi = {10.1016/S0032-3861(01)00113-6}, + file = {:DBD\\Zou-epoxy-2001.pdf:PDF}, + publisher = {Elsevier}, + url = {\href{http://dx.doi.org/10.1016/S0032-3861(01)00113-6}{http://dx.doi.org/10.1016/S0032-3861(01)00113-6}} +} + +@BOOK{CRC07, + title = {CRC Handbook of Chemistry and Physics}, + publisher = {Taylor and Francis}, + year = {2007}, + editor = {David R. Lide}, + pages = {12-114}, + edition = {87th}, + file = {:DBD\\CRC-Work functions-2007.pdf:PDF}, + url = {http:/www.hbcpnetbase.com} +} + +@STANDARD{ASTME1294, + title = {{ASTM}~E~1294-89~(1999), Standard Test Method for Pore Size Characteristics + of Membrane Filters Using Automated Liquid Porosimeter}, + organization = {ASTM International}, + url = {http://www.astm.org/DATABASE.CART/WITHDRAWN/E1294.htm} +} + +@STANDARD{ISO10780, + title = {{ISO}~10780:1994, Stationary source emissions -- Measurement of velocity + and volume flowrate of gas streams in ducts}, + organization = {ISO}, + url = {http://www.iso.org/iso/catalogue\_detail.htm?csnumber=18855} +} + +@STANDARD{ISO4003, + title = {{ISO}~4003:1977, Permeable sintered metal materials -- Determination + of bubble test pore size}, + organization = {ISO}, + url = {\newline http://www.iso.org/iso/catalogue\_detail.htm?csnumber=9678} +} + +@STANDARD{ISO4287, + title = {{ISO}~4287~(1997), Geometrical Product Specifications Surface Texture + Profile Method Terms, Definitions and Surface Texture Parameters}, + organization = {ISO}, + url = {http://www.iso.org/iso/catalogue\_detail.htm?csnumber=10132} +} + |